Evaluation of the TiO2 Anti-Reflective Coating in PERT Solar Cells with Silicon Dioxide Passivation

Zanesco, Izete, Moehlecke, Adriano, C. M. Model, José, Ly, Moussa, de Aquino, Jéssica, Zanotto Razera, Ricardo Augusto, Crestani, Thais, da Conceição Osório, Vanessa, Alves Gonçalves, Vanessa

ISES Solar World Congress 2019 · Santiago, Chile · 2019-11-04
Published by International Solar Energy Society (ISES)
DOI: 10.18086/swc.2019.19.13

Abstract

The PERC solar cell is produced by the industry because the passivation in both faces can improve the efficiency. The passivation and anti-reflective (AR) coating is usually performed using SiNx. However, the SiO2 can produce a good passivation in the emitter as well as in the boron BSF. The goal of this paper is to present the analysis of the TiO2 AR coating in PERC solar cells passivated with SiO2. Based on previous studies, the dry oxidation was performed with two temperatures and, for each SiO2 layer grown in the emitter, the thickness of the TiO2 AR coating evaporated by e-beam technique was optimized. The efficiency of 16.8 % was achieved with the double layer in the emitter of 42 nm TiO2 coating and of 50 nm SiO2 layer. The lowest weighted average reflectance was of 2.8 %. The metallization paste firing reduces the thickness of the SiO2/TiO2 layer and a low internal quantum efficiency occurs in high wavelengths for thinner TiO2 coating.

← All proceedings papers